Coherent
UV Optical Components
UV Optical Components

UV Optical Components

Making the most of a UV laser beam.

Attenuators

Attenuator Module, Manual

Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With manual knob and digital scale for accurate transmittance setting. Electromagnetic shutter.

Attenuator Module, Motorized

Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With DC motor and encoder, ACM RS-232 interface module, interface cables, and control software for Microsoft Windows. Electromagnetic shutter.

Attenuator Module for 157 nm

Leak-tight module housing with an observation window. Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. Manual knob and digital scale for transmittance setting. Electromagnetic shutter. Flanges for tube connections and vacuum exhaust. Purge gas inlet and exhaust gas outlet with gate valve.

Features & Benefits


Specifications

Wavelength (nm)Attenuator Module, Manual (Part No.)Attenuator Module, Motorized (Part No.)
Attenuator Module for 157 nm (Part No.)
157Not AvailableNot Available
1111338
19329102181116186
Not Available
24829102162910566
Not Available
30811161811116184
Not Available
3511161822910568
Not Available

Homogenizers - Superior Optics and Coatings

Because excimer lasers produce high-energy pulses of ultraviolet light, the materials used to make the optics must be carefully selected and the optics themselves must be carefully designed. You can rely on our deep knowledge and many years of experience to deliver the exact solutions you need.

Specifications

Homogenizer 5 x 5Homogenizer 10 x 10
Homgenizer 20 x 20
Homogenized Field Size (mm)5 x 510 x 10
20 x 20
Zoom±10%±10%
±10%
Homogeneity<±5%<±5%
<±5%
Field PositionEntrance apertureEntrance aperture
Entrance aperture
Appox. 600 mm after Homogenizer Exit (depending on wavelength)32 x 32 mm, overall size entrance-exit approx. 1100 mm (depending on wavelength)29.6 x 29.6 mm, overall size entrance-exit approx. 1000 mm (depending on wavelength)
29.6 x 29.6 mm, overall size entrance-exit approx. 900 mm (depending on wavelength)
Other versions on requestField dimensions from 4 x 4 mm up to 200 mm
Part No. 193 nm11161981116202
Part No. 248 nm11161991116203
Part No. 308 nm11162001116204
Part No. 351 nm11162011116205


Projection Lenses

P-lens 4-10x/4-xxxP-lens 5x/18-xxxP-lens 5x/30-xxxDoublet 50-xxx
Doublet 100-xxx
Wavelength (nm)157157
193193193
248248248248
308308308308308
351351351
Demagnification4 to 10x (higher demagnification on request)5x5xVariable
Variable
Focal Length (mm)Approx. 100Approx. 50
Approx. 100
Image Field Diameter (mm)41830Depending on wavelength
Depending on wavelength
Numerical ApertureDepending on wavelength (diffraction-limited for all available wavelengths)0.13 (diffraction limited)0.1 (diffraction limited)
Spatial Resolution (µm)3 lines and spaces2 lines and spaces2.5 lines and spaces50 lines and spaces50 lines and spaces
Working DistanceDepending on wavelength, use of eye piece, and demagnificationDepending on wavelengthDepending on wavelengthApprox. 35 mmApprox. 70 mm
Tracking LengthDepending on wavelength, use of eye piece, and demagnification800 mm1050 mmDepending on wavelength and demagnification ratioDepending on wavelength and demagnification ratio
Transmission>80%>80%>80%--
Part No. 157 nm11162111116216
Part No. 193 nm968001111162121116217
Part No. 248 nmM290009M29002211162131116218
Part No. 308 nm1116206M290008968005211162142921330
Part No. 351 nm111620711162151116219

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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