LAMBDA SX
LAMBDA SX

LAMBDA SX

High-Power Excimer Lasers

The LAMBDA SX industrial excimer laser series provides unique UV power to the production floor. It delivers high and stable pulse energy and features a number of innovative technologies to provide superior performance and reliability.

LAMBDA SX lasers are perfectly suited for applications ranging from microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA).

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
LAMBDA SX C600
308
600
1000
600
LAMBDA SX E500
500
1000
500

Applications

Application
Process
Material

Ink-Jet Nozzle Drilling
3D-Structuring
Roll-To-Roll Circuit Patterning
Pulsed Laser Deposition
Automotive Cylinder Hardening
Excimer Laser Annealing
Sequential Lateral Solidification
Ablation-Material Removal
Ceramic
Glass
Polymer
Plastic
Metal
Semiconductor

Features & Benefits


LAMBDA SX Key Feature
Customer Benefit
High Stabilized UV Power
Fast, large area processing at lowest costs per Watt
ExiScope Software (optional)
Onboard logging and evaluation of laser parameters
PowerLok
Smooth burst cycles
TimeLok
Stable trigger-to-pulse delay
Adjustable Pulse Energy
Advanced process control
Motorized optics mounts (optional)
Remote beam adjustment via hand-held control panel
Solid-State Switch
Maintenance-free operation
Purged, External Resonator Design
Highest beam stability and optics lifetime
Corona Preionization
Stable, homogeneous output
Metal Ceramic Tube
Extended tube lifetime
Energy Monitor
Preset, stabilized energy output


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Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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